Report: Chinese Fabs Have Acquired About 343 DUVi Tools

A report from the Center for Technology & Statecraft, a U.S. think tank, estimates that Chinese fabs had acquired roughly 343 DUVi immersion lithography tools by early 2026, with about 270 of those tools supplied by ASML. The findings were reported by Howard Liu in the South China Morning Post and surfaced on Techmeme on October 3, 2026.

The report centers on DUVi equipment, which it describes as less advanced than EUV but adaptable. According to the report, these tools can be modified to manufacture 7nm logic chips, as well as advanced memory built for AI processors, namely HBM. The ASML figure of roughly 270 tools is the only supplier breakdown given in the account of the report, alongside the overall total of about 343 DUVi tools.

The picture the reporting leaves is a snapshot as of early 2026: Chinese wafer fabs holding around 343 DUVi immersion tools, approximately 270 of them from ASML, with the equipment itself described as capable of being adapted for 7nm logic production and HBM for AI processors once it is modified. Nothing in the material describes what happened after that point — no further purchases, no changes to export rules, and no responses from ASML, the think tank, or any other party are mentioned, so the account stops at the report's own numbers and its assessment of what the tools can be turned to.